Inficon INF-350-065 PSG500 Vacuum Gauge

PSG500 4-VCR (1/4″).

$2,185.99 ex. GST
$2,513.89 incl. GST

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The INFICON Pirani Standard Gauges, PSG500 and PSG502-S, PSG510-S and PSG512-S employ the most advanced digital Pirani technology available in the marketplace. The rugged stainless steel sensor cell and compact design qualify them for use on semiconductor systems and for standard applications, such as fore vacuum lines.

FEATURES:

  • 1:1 compatible to TTR 91 and TTR 96 Pirani Transmitter Series
  • Easy push button ATM and HV adjustment
  • Space-saving rugged design
  • Aluminium housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance.

APPLICATIONS:

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range.

INCLUDES:
1 x Inficon 350-065 PSG500 Vacuum Gauge, 1 x English manual and 12-month warranty.

SPECIFICATIONS:

TypePSG500 tungstenPSG500-S tungsten, setpointsPSG502-S nickel, setpoints
Measuring principlethermal conductance according to Piranithermal conductance according to Piranithermal conductance according to Pirani
Accuracy(N2)
1 x 10-3 … 100 mbar% of reading±15%
5 x 10-4 … 1 x 10-3 mbar% of reading±50%
100 … 1000 mbar% of reading±50%
Repeatability (air)
1 x 10-3 … 100 mbar% of reading2%2%2%
Output signal (measurement signal)
Voltage rangeV0 … +10.30 … +10.30 … +10.3
Measurement rangeV+1.9 … +10.0+1.9 … +10.0+1.9 … +10.0
Measurement range (air, 02, CO, N2)mbar5 x 10-4 to 10005 x 10-4 to 10005 x 10-4 to 1000
Setpoint
Setting rangembar2 x 10-3 … 5002 x 10-3 … 500
Number of setpointsNumber of setpointsnone22
Hysteresis% of reading10% above lower threshold10% above lower threshold
Relay contact3030
Relay contact: Switching timems<20<20
Supply voltage
At gaugeV (dc)+14 …+30+14 …+30+14 …+30
RippleV (p-p)≤1≤1≤1
Voltage vs. pressurelogarithmic 1.286 Volts per decadelogarithmic 1.286 Volts per decadelogarithmic 1.286 Volts per decade
Internal volume
DN 16 ISO-KF, DN 16 CF-R, 7/16-20 UNFcm³ (in.³)1.5 (0.092)1.5 (0.092)1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R long tubecm³ (in.³)10 (0.61)10 (0.61)10 (0.61)
1/8” NPT , 4 VCR, 8 VCR, 1/2” tubecm³ (in.³)2 (0.122)2 (0.122)2 (0.122)
Admissible temperature
Operation°C+5 … +60+5 … +60+5 … +60
Vacuum connection (1)°C80 / 250 (2)80 / 250 (2)80 / 250 (2)
Storage°C-20 … +65-20 … +65-20 … +65
Weight
DN 16 ISO-KF, 7/16-20 UNFg808080
DN 16 CF-R, 4 VCRg100100100
1/8” NPT, 1/2” tubeg707070
8 VCR, DN 16 ISO-KF long tubeg130130130
DN 16 CF-R long tubeg140140140
Error signalV0 … +0.5 (filament rupture)0 … +0.5 (filament rupture)0 … +0.5 (filament rupture)
Output impedance2 x 4.72 x 4.72 x 4.7
Minimum loaded impedancekΩ10, short-circuit proof10, short-circuit proof10, short-circuit proof
Response timems808080
Gauge identificationkΩ27.0, referenced to supply common27.0, referenced to supply common27.0, referenced to supply common
Adjustmentone tactile switch for ATM and HV adjustmentone tactile switch for ATM and HV adjustmentone tactile switch for ATM and HV adjustment
Current consumptionmA<500 (max. starting current)<500 (max. starting current)<500 (max. starting current)
Power consumptionW≤1≤1≤1
Electrical connectionFCC 68 / RJ45 appliance connector, 8 poles, maleFCC 68 / RJ45 appliance connector, 8 poles, maleFCC 68 / RJ45 appliance connector, 8 poles, male
Sensor cable8 poles plus shielding8 poles plus shielding8 poles plus shielding
Cable lengthm≤100 (8 x 0.14 mm2)≤100 (8 x 0.14 mm2)≤100 (8 x 0.14 mm2)
Materials exposed to vacuumglass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
FilamentWWNi
Admissible pressurebar (absolute)10, limited to inert gases10, limited to inert gases10, limited to inert gases
Mounting orientationanyanyany
Degree of protectionIP40IP40IP40

 

Documents

Inficon 350-065 PSG500 Vacuum Gauge English Manual

Inficon 350-065 PSG500 Vacuum Gauge Data Sheet

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